Tuesday, August 21, 2012

Nitrogen Trifluoride

Nitrogen Trifluoride









  • Nitrogen trifluoride is the inorganic compound with the formula NF3, this nitrogen-fluorine compound is a colorless, toxic, odourless, nonflammable gas. 
  • It finds increasing use as an etchant in microelectronics.
  • Nitrogen trifluoride is used in the plasma etching of silicon wafers.
  • Today nitrogen trifluoride is predominantly employed in the cleaning of the PECVD chambers in the high volume production of liquid crystal displays and silicon-based thin film solar cells. 
  • In these applications NF3 is initially broken down in situ, by a plasma. 





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